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MEMS Pressure Sensors: Fabrication and Process Optimization
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MEMS Pressure Sensors: Fabrication and Process Optimization
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MEMS Pressure Sensors: Fabrication and Process OptimizationMEMS Pressure Sensors: Fabrication and Process Optimization describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness
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MEMS Pressure Sensors: Fabrication and Process Optimization
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99924449414
US$ 112.34
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