CPS Vacuum Pump Activated Carbon Exhaust FilterCarbon Exhaust Filter for CPS Vacuum Pumps Replaces Koby Junior (US Patent# 3169112A) CPS Vacuum Pump Activated Carbon Filter for use with CPS brand vacuum pumps. This filter will adsorb contaminants such as oil aerosols, oil vapors, certain other hydrocarbon vapors, and trace moisture. They also trap all foreign solid particles and bacteria down to 0. 5 microns in size. Key Features: Purifies Exhaust Gases from Vacuum Pumps Up to 19 CFM 0. 5 Micron